MEMS gyroscope continue to face challenges as an emerging device. Nowadays, more and more application fields require gyroscopes to collect receipts in high-temperature environments. Compared with other types of gyroscopes, MEMS gyroscopes are smaller, have lower cost and power consumption, and can be used on semiconductors of the same size. The signal conditioning circuit is integrated into the package and is more flexible. However, continuous operation in a harsh and high-temperature environment may cause the equipment to be continuously affected by shock and vibration, resulting in failure or excessive wear. Moreover, the temperature of most MEMS gyroscope is between -45 degrees and +85 degrees, which obviously does not meet the requirements of high-temperature environments. Therefore, in order to meet market demand, Ericco developed and produced the high-temperature north-seeking MEMS gyroscope ER-MG2-022 (https://www.ericcointernational.com/gyroscope/mems-gyroscope/high-temperature-north-seeking-mems-gyro-for-gyro-tools125c.html.) that can adapt to harsh high-temperature environments. It can accurately measure angular rate in the face of shock and vibration, and its maximum working temperature can reach 125℃.
The following will introduce the working principle, vibration suppression, installation and application of MEMS gyroscopes.

The working principle of MEMS gyroscope
MEMS gyroscopes are based on the Coriolis force and use Coriolis acceleration to measure angular rate. Figure 1 explains the Coriolis effect. The blue circle in the picture is the rotating platform. We imagine that we are standing near the center of the rotating platform. Our speed relative to the ground is represented by the length of the blue arrow. If we move to the outer edge of the rotating platform, our speed relative to the ground will increase in speed, represented by the longer blue arrow. The growth rate of tangential velocity caused by radial velocity is Coriolis acceleration. To put it more simply, when we move from the center of the rotating platform to the outer edge, we need to increase the velocity component to maintain our moving path. The acceleration required in this process is Coriolis acceleration.
Figure 2 illustrates the Coriolis effect. When the resonant mass moves toward the outer edge of the rotating platform, it accelerates to the right and exerts a reaction force to the left. As it moves toward the center of rotation, it exerts a force to the right (green arrow in the figure).
Coriolis acceleration is measured using a spring at 90° to the direction of motion, with the frame containing the resonant mass attached to the substrate (Figure 3). Figure 4 shows its complete structure. When the mass body moves and the installation body where the gyroscope is located rotates, the mass body and its frame will be affected by Coriolis acceleration and rotate 90° due to vibration.

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