MEMS gyroscopes use the principle of sensing angular velocity of vibrating objects and use vibrations to induce and detect the Coriolis force. Therefore, MEMS gyroscopes have no rotating parts, no bearings, and can be mass-produced using micromachining technology. Most MEMS gyros rely on alternating Coriolis forces caused by mutually orthogonal vibrations and rotations, with the vibrating object suspended from a substrate by a soft elastic structure. The overall dynamic system is a two-dimensional elastic damping system in which vibration- and rotation-induced Coriolis forces transfer energy proportional to the angular velocity to the sensing mode.
As can be seen in Figure 2, the mass (m) is connected to the “inner frame” through the damping spring structure (k1). In addition, an actuator controlled by a positive feedback system is used to drive the mass to undergo simple harmonic vibration. The feedback system ensures that the mass maintains a regulated, continuous oscillation along the x-axis. Furthermore, the inner frame is connected to the “sensor frame” via a second damping spring structure (k2) at 90° to the direction of mass oscillation. This configuration allows the inner frame to move in the y-axis direction when a force is present in that direction.
Angular velocity can be detected when a MEMS gyroscope rotates about an axis perpendicular to the XY plane shown in the figure. Figure 3 shows the process of counterclockwise rotation of the gyroscope on a fixed platform. This image shows the gyroscope at two different times. Although the distance of the sensor from the center of the platform is fixed, we know that the mass distance changes from r1 to r2 due to its oscillation in the x-direction of the sensor frame. In this example, the mass distance increases by r2 > r1. Based on this principle and structure, Ericco has designed MEMS gyros suitable for use in many fields, such as the ER-MG2-50/100 https://www.ericcointernational.com/gyroscope/mems-gyroscope/er-mg2-100-north-seeking-mems-gyro.html) suitable for ground navigation, whose bias instability can reach 0.01-0.02°/hr bias instability. The ER-MG2-300/400 (https://www.ericcointernational.com/gyroscope/mems-gyroscope/er-mg2-300-navigation-mems-gyro.html) is used for air and maritime navigation, and the deviation instability can reach 0.03-0.05° deg/hr.

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