1. Performance test content
The main indicators of the MEMS tilt sensor sensor chip include static capacitance, static performance test and dynamic performance test. The static performance test includes measurement range, sensitivity, linearity, transverse sensitivity and zero stability. The dynamic performance test is mainly the bandwidth test.

1.1 Static capacitance test
The static capacitance test was performed using wafer probe bench and Agilent 4294A impedance analyzer, as shown in Figure 4.10, mainly for screening MEMS tilt sensor sensitive chips before packaging.

Static capacitance test diagram

The specific steps of static capacitance test are as follows:
(1) The sensitive chip prepared by the lead pad is placed on the table of the probe table in the 0g state;
(2) The measurement mode of the impedance analyzer is set as impedance-frequency test, the sweep frequency range is 2kHz~3kHz, and the excitation source voltage amplitude is 0.5V;
(3) Adjust the two probe bases, and contact the probe with the top cover pad and the middle sensitive structure layer pad respectively to obtain the impedance-frequency test curve, as shown in FIG. 4.11 (a), and obtain the equivalent capacitance by fitting;
(4) Adjust the two probe bases again, and contact the probe with the bottom cover plate of the sensitive chip and the welding pad of the middle sensitive structure layer respectively to obtain the impedance-frequency test curve, as shown in Figure 4.11 (b), and obtain the equivalent capacitance by fitting.
It can be seen from the test that the static capacitance of the middle sensitive structure layer and the upper and lower cover plate of the sensitive chip is 5.24pF and 5.16pF respectively, which has a good symmetry.