MEMS sensor is based on MEMS technology. MEMS is the abbreviation of microelectromechanical systems. It is a technology manufactured using micromachining technology, which is defined as micro-mechanical and electromechanical components. MEMS sensor is very small in size, similar to the size of a fingernail, and may range from 1 micron to several millimeters.
MEMS sensor is a device that converts one form of energy into another, which requires converting mechanical signals into electrical signals. The main advantages of MEMS sensor is low cost, high accuracy and wide application, such as oil logging, aerospace, drones, mining, etc.
MEMS technology is an expanded version of traditional integrated circuit (IC) manufacturing. IC manufacturing is also known as VLSI (Very Large Scale Integration). The main difference between it and MEMS is that in IC we only manufacture electrical components such as inductors and capacitors, but in MEMS mechanical components such as gears, beams, springs etc. are manufactured on a single chip.

▪ MEMS sensor can be divided into:
MEMS accelerometers: for electronic stability control and airbag deployment
MEMS gyroscopes: used to measure yaw, pitch and roll for autonomous driving.
MEMS Pressure Sensors: Tire Pressure Monitoring Systems and Brake Control
MEMS magnetic field sensor: for navigation directions
Among them, MEMS gyroscopes are the most widely used. MEMS gyroscopes are chip-type gyroscopes. In the field of petroleum logging, MEMS gyroscopes are mainly used in gyro tools. For example, MG2-022 (https://www.ericcointernational.com/gyroscope/mems-gyroscope/high-temperature-north-seeking-mems-gyro-for-gyro-tools125c.html) is specially designed for gyro tools. The maximum temperature of ordinary MEMS gyroscopes can reach 85 degrees, while 022 can reach 125 degrees. In the aerospace field, MEMS gyroscopes are mainly used in IMU, INS and other equipment. For example, MG2-300/400 (https://www.ericcointernational.com/gyroscope/mems-gyroscope/er-mg2-300-navigation-mems-gyro.html) is specially designed for air navigation, with 0.03-0.05°deg/hr bias instability and 0.01-0.025°/√hr angular random walk.
In addition, MEMS gyroscopes can also play a great role in mining, surveying and mapping and other fields.

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